Upgrade to PTIQ

PTIQ是针对PlasmaPro、Plasmalab和AtomLab处理设备的最新智能软件解决方案。

卓越的响应系统控制水平
Optimise system and process performance
人性化设计

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Intelligent Software. Powerful Solutions.

升级以获得最佳性能

PTIQ is the latest software innovation for utilising Plasma Technology systems. Introduced to replace the PCx series of software applications, its modern design and powerful feature-set greatly improves the user/ownership experience, and the all-new architecture provides a solid foundation for all future development.

随着系统/硬件支持（覆盖范围）的增加，以及新功能的增加，PTIQ将越来越多地代表等离子技术产品的核心价值主张。

PTIQ优于PCx的好处

人性化设计

现代化的用户界面设计，提高生产效率。
New architecture, rebuilt from the ground up, makes possible a wealth of future innovations, such as advanced analytics and system diagnostics that will provide more insight into your system’s performance than ever before

改进操作和个性化

改进的错误报告，包括主动设备联锁和故障排除指南
校准设备读数，如压力读数，以提高过程重复性的准确性
用更强大的设备控制（包括“保持”和“强制”）取代了服务模式，提高了灵活性
单个集成应用程序，允许页面之间的超链接
维修模式更换允许手动控制，互锁带电
Personalisation feature enabled improved customisation and efficiency

PTIQ Screen Layout

提高准确性

Internals run on accurate 10ms synchronised clock for jitter-free control, metronomic output and oscilloscope-like measurements
可以记录日常维护程序，并在改进的配方结构中运行

Features

食谱特色

现在可以定义每个步骤的公差值，从而对流程进行更精确的控制
同时编辑多个食谱
Cut, Copy and Paste whole recipes or parts of recipes
Whole recipe viewable on one page
Ability to alter chamber options during recipe (wafer lift, table lift, ESC, etc.)

附加功能

功能强大且灵活的调度，通过基于路径的逻辑提高加工效率，并改进多腔室访问、返回加载站、晶圆间和晶圆对准操作的逻辑
可以图形化地创建复杂的晶圆路径、多个腔室访问、返回加载站和晶圆间操作
Guaranteed 100 Hz sampling frequency, significantly improved over 4 Hz variable frequency of PCx, provides insight into high-frequency processes and instabilities (e.g., DC bias switching) and parameter transitions in ALD/ALE that were not previously observable

Upgrading to PTIQ

If you currently run a system with PC2000 or PC4500, and want to upgrade to PTIQ, we have several upgrade paths available.

我们也有站点范围的PTIQ升级计划；您可以以折扣价升级整个网站，以确保未来软件支持的连续性。

*PTIQ upgrade is not currently available on FlexAL or Ionfab platforms.

**系统升级资格将根据具体情况进行评估，但您可以使用此处的资格检查器开始。

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常见问题

我们需要哪些硬件升级才能升级到PTIQ？

这将是由个案进行评价。Certain system types, particularly more recent ones, are more likely to be supported without additional development. Older system types may lack support for specific components, while other may not be supported entirely (thus replacement is worth consideration).

In addition to component level support, X20 PLCs (1584 or later) are also required, as is 8GB of PC memory and a 1080p display.

使用现有的PC4500软件，LogViewer日志文件可以viewed on another PC if manually transferred to another PC. It would useful if remote users could more easily access data files and analyse it. What will the new software offer?

我们将很快将Datalog viewer打包为一个独立的产品，以便它可以安装在单独的PC上。我们希望使文件传输过程更加容易。