FAST & ACCURATE AUTOMATIC PRESSURE CONTROL

This controller ensures very fast and accurate pressure control. The system parameters are set up automatically within the tool on first startup after the upgrade has been fitted. The adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus ensures optimum pressure control at any time.

APC用于在前体的剂量步骤期间限制泵送。慢反应前体需要经常需要长时间的曝光时间，或者需要沉积到高纵横比。

Features & benefits

• Increases precursor efficiency for slow to react precursors (e.g. Hafnium)
• 允许沉积成高纵横比
• Sampling rate: 10 ms
• Control accuracy: 5 mV or 0.1% of maximum sensor range, whichever is greater
• 一步解决:20 000 (steps = 0 - 90° rotation)
• The control valve has fast and strong actuator
• High-performance, integrated controller
• Extremely short control response times and position indication
• Automatic maintenance indication
• 优异的抗污染过程