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Service & Support

Support Packages

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Oxford Instruments provides services from R&D start-up to fab expansion, from pilot lines to mass production. Whatever your needs we have a service package to ensure your system and lab or fab are operating at peak performance.

Remote Support

Flexibility to maintain the performance of your systems with our remote support service.

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Self Sufficiency

Freedom to manage and maintain your systems using your own engineers.

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Service Agreements

Agreements to ensure our engineers will support you whenever you need us.

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Service Support Options

Software Assurance Agreements, Preventative Maintenance and Service Credits.

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Remote Support

To ensure continued optimal performance of your tool, this support package has been designed for customers who have a strong technical team and desire to maintain the equipment themselves with the remote support of the highly skilled Technical Team at Oxford Instruments.

We provide support through innovative platforms to resolve smoothly the technical issues, using Helpdesk, TeamViewer and Live Assist. The remote support is available during our office hours 08:00am - 17:00 pm from Monday to Friday.

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The Remote Support Package includes:

Response time within 48 hours during Oxford Instruments business days (national holidays are excluded)
Remote support Toolkit which includes speakers, Wi-Fi dongle, iPad, wireless headset, webcams and various cables and chargers.
1 PM kit along with engineer remote support to complete the PM
Repair parts identified while troubleshooting remotely included. There is an optional add on for consumables that are excluded from the PM kits.
10% discount for future services including spares, consumables, and upgrades
Subject to regional location, transport routes and export requirements. Delivery of parts into high risk countries cannot be guaranteed.

Self Sufficiency

Our Self Sufficiency packages give you the freedom to manage and maintain your system using your own engineers – with a little help from us when you need it.

Self Sufficiency Package

If you want to take care of your equipment inhouse, our self-sufficiency package gives you the in-depth training required to maintain uptime with access to help desk support, discounted spares and engineering time.

This package is suitable for Universities,
Institutions and pilot R&D production who have engineering support on-site but require maintenance training for Engineering teams.

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Self Sufficiency Plus Package

The Plus package has all the features of Self Sufficiency enhanced with additional training services, fast help desk access and a number of guaranteed onsite visits from our highly experienced field service engineers.

Software assurance is also included in the Self Sufficiency
Plus Package.

Service Agreements

Our Service Support Agreements provide access to our expert help desks, field service engineers and spare parts to ensure that uptime, cost of ownership and productivity stay at an optimal level if you don't have in-house engineering support.

Priority Support Package

优先支持包给了心灵的平静t minimal investment knowing that access to the help desk and a number of engineer visits within 5 days can be accessed.

This package is suitable for customers who require access to our helpdesk and limited on-site support with the option of including spare parts. Customers with single chamber products such as Ion Beam, PlasmaPro 100 etch and deposition tools typically purchase this agreement.

This service agreement will follow on from your warranty period and will ensure continued optimal performance of your tool. Investing in this package provides peace of mind that access to Oxford Instruments is readily on hand.

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Production Critical Package

Offering unlimited access to our helpdesk and field service engineers, the Production Critical package is for those who require a higher level of guaranteed support for a greater level of uptime with the option of including spare parts.

Customers with PlasmaPro single chamber and multi-chamber clusters typically purchase this agreement. This service agreement automatically enhances the warranty period to the same production critical response times.

Feature Comparison

Warranty Agreements

	REMOTE SUPPORT	SELF SUFFICIENCY	SELF SUFFICIENCY PLUS	PRIORITY SUPPORT	PRODUCTION CRITICAL
Duration	12 months from end of warranty period		24 months from acceptance or 90 days from delivery	12 months from end of warranty period	24 months from acceptance or 90 days from delivery
Upgraded warranty			✔		✔
Training		1 credit	2 credits		2 credits
Technical Help Desk opening hours	Normal office hours: 08:00-17:00 Monday-Friday
Technical Help Desk response time	Within 48 hours	Within 24 hours	Within 4 hours	Within 24 hours	Within 4 hours
Engineer site visits	Remote support Toolkit sent in advanced of PM	10% discount for engineer site visit	Up to 2 visits. Engineer prioritised on-site within 2 working days	Up to 2 visits. Engineer prioritised on-site within 5 working days. 10% discount for further engineer visits	Unlimited visits. Engineer prioritised on-site within 2 working days
Preventative Maintenance	1 PM Kit / module with dedicated engineer connected remotely	✔	✔	✔	✔
Parts (not including Consumables)				Optional extra	Optional extra
Discount on all spares	10% discount	10% discount	15% discount	10% discount	15% discount
Software Help Desk support	10% discount	10% discount	Normal office hours: 08:00-17:00 Monday-Friday
Software Help Desk response time			4 hours	24 hours	4 hours
Software Assurance Agreement	10% discount	10% discount	Min. once per annum feature release	10% discount	Min. once per annum feature release

Service Agreements

	REMOTE SUPPORT	SELF SUFFICIENCY	SELF SUFFICIENCY PLUS	PRIORITY SUPPORT	PRODUCTION CRITICAL
Duration	12-36 months
Training		1 credit	2 credits		2 credits
Technical Help Desk	Normal office hours 08:00-17:00 Monday-Friday
Technical Help Desk min. response time	Within 48 hours	Within 24 hours	Within 4 hours	Within 24 hours	Within 4 hours
Engineer site visits	Remote support Toolkit sent in advanced of PM	10% discount	Maximum 2 visits with engineer on-site within 2 working days	Maximum 2 visits with engineer on-site within 5 working days and 10% discount for further visits	Unlimited visits with engineer on-site within 2 working days
预防性维护ance	1 PM Kit / module with dedicated engineer connected remotely included	✔	✔	✔	✔
Parts (not including consumables)				Optional extra	Optional extra
Discount on all spares	10% discount	10% discount	15% discount	10% discount	15% discount
Software Help Desk	10% discount	10% discount	Normal office hours 08:00-17:00 Monday-Friday and response within 4 hours	Normal office hours 08:00-17:00 Monday-Friday and response within 24 hours	Normal office hours 08:00-17:00 Monday-Friday and response within 4 hours
Software Assurance Agreement	10% discount	10% discount	Minimum once per annum feature release	10% discount	Minimum once per annum feature release

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Global Customer Support

Oxford Instruments is committed to providing comprehensive, flexible and reliable global customer support. We offer excellent quality service throughout the life of the tool.

Remote diagnostics software provides quick & easy fault diagnosis & resolution
Support agreements are available to suit the budget and situation
Global spares in strategic locations for quick response
Global service engineers provide preventative maintenance service &
support
A wide range of upgrades, for process improvements, greater productivity & reduced cost of ownership of your tool are available

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