PDMS

Wafer size: up to 2" Product: PlasmaPro 80
Wafer size: up to 100mm Product: <a href="//www.tndongsheng.com/plasma/products/icp-etching/plasmapro-100-cobra-icp">PlasmaPro 100

Polydimethylsiloxane(PDMS) belongs to a group of polymeric organosilicon compounds that are commonly referred to as silicones. PDMS is the most widely used silicon-based organic polymer, and is particularly known for its unusual rheological (or flow) properties. It can be etched usingInductively Coupled Plasma (ICP)and反应离子刻蚀(RIE).