AFM和EBSD材料特性的相关性成像

Atomic Force Microscopy (AFM) can measure nanoscale topography along with a range of electrical, mechanical, and functional properties. Sometimes additional information about the composition or crystallographic structure of the materials can help interpret or validate the AFM results. This application note presents one such case in which both AFM and电子反向散射衍射（EBSD）用于在铜合金中映射各个颗粒的刚度和模量。

在庇护研究中以接触共振模式测量样品刚度巧克力垃圾. The sample modulus was calculated from the crystallographic orientation data measured by an Oxford Instruments NanoAnalysis Symmetry EBSD detector. Despite the two very different techniques, the results correlated well with each other. This simple example demonstrates the potential for correlative imaging with AFM and EBSD. Similar approaches could be used with other AFM imaging modalities and with other SEM/TEM NanoAnalysis tools, including Energy Dispersive Spectroscopy (EDS).

The application note describes:

• How microstructural data complements direct mechanical measurements
• 从EBSD获得的微结构数据类型
• 如何直接测量刚度谐振模式AFM
• 这些结果如何在铜合金样品的情况下关联

(Free download, compliments of Asylum Research, the Technology Leader in Atomic Force Microscopy)